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Thickness Optimization of AlN Thin Films Deposited By RF Magnetron Sputtering
Uzgur, Sinem; Hutson, David; Kirk, Katherine (Ieee, 2012)Aluminium nitride (AlN) which has a wurtzite crystal structure is highly suitable material for applications in a wide range field of ultrasonic transducers, non-destructive testing and MEMS- Micro- Electro- Mechanical ...